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Phone: +86 16626708626Description
3. Key Technical Specifications
| Parameter | Specification Value |
|---|---|
| Catalog Part Number | 3096-1000 |
| Manufacturer | Control Concepts Inc. (OEM for Applied Materials) |
| AMAT Equivalent Part Number | 1001101-0002 / 3096-1000 Series |
| Control Technology | Silicon Controlled Rectifier (SCR) phase-angle & burst fire control |
| Application Environment | Semiconductor Wafer Processing (RTP, CVD, Epitaxy chambers) |
| Output Load Channels | Dual/Multi-zone lamp & resistive heater drive outputs |
| Diagnostic Indicators | Front-panel LEDs (Lamp Current, Command, Current Limit, Heater Alarms) |
| Metering | Integrated digital LED Ratio Meter with front-panel adjustment potentiometers |
| Power Terminations | Heavy-duty barrier strip terminals (Line 1, Line 2, Lamp Load 1, Lamp Load 2, Ground) |
| Enclosure Construction | Aluminum/Steel panel mount with integrated heat sink fins |
4. Product Introduction & Supply Chain Strategy
The Control Concepts 3096-1000 is a high-precision SCR power controller designed specifically for demanding thermal processing applications in semiconductor fabrication equipment, notably Applied Materials (AMAT) wafer processing systems. By firing SCR thyristors with high precision, the 3096-1000 maintains exact temperature profiles across multi-zone quartz lamp arrays, preventing thermal non-uniformity and wafer defect generation.
This unit is a Brand New Surplus item. It is not used, not pulled from scrapped fab lines, and not refurbished. All internal SCR gate drivers, optical isolation circuits, and current-limiting feedback networks undergo full electrical bench testing prior to dispatch.
In semiconductor manufacturing, an SCR firing failure or open load fault in a lamp driver module immediately ruins wafer batches and halts chamber productivity. Sourcing verified New Surplus Control Concepts 3096-1000 units allows fab maintenance technicians to instantly swap failed power modules, bypassing long lead times from OEM tool manufacturers and restoring chamber process stability.
3096-1000
3096-1000
5. Installation & Configuration Guide
High Voltage Semiconductor Line Hazard
The 3096-1000 controls high-voltage, high-current AC lines connected to high-intensity quartz lamp banks. Always verify main circuit breaker isolation and Lock-Out/Tag-Out (LOTO) procedures before touching line or load terminal screws.
1
Power Isolation & Safety Check
Prerequisite
1.Power Isolation & Safety Check:Prerequisite.
Isolate main AC power to the semiconductor tool electronics rack. Verify zero AC line voltage across primary supply conductors using a digital multimeter.
2
Mechanical Panel Mounting
Hardware Setup
2.Mechanical Panel Mounting:Hardware Setup.
Slide the 3096-1000 chassis into the sub-rack enclosure slot. Secure front-panel retaining screws to ensure solid chassis grounding and thermal dissipation through the enclosure mounting frame.
3
Power & Control Signal Connections
Wiring
3.Power & Control Signal Connections:Wiring.
Connect high-current Line inputs (Line 1, Line 2) and Lamp Load outputs to the terminal strip using ring terminals torqued to OEM specifications. Plug the analog control command harness into the side DB-connector interface.
4
Ratio Pot & Zero Calibration
Potentiometer Adjustment
4.Ratio Pot & Zero Calibration:Potentiometer Adjustment.
Verify front-panel Ratio Pot settings match chamber tool specification parameters to ensure balanced power distribution between inner and outer heating lamp zones.
5
Power-On Diagnostic Verification
Verification
5.Power-On Diagnostic Verification:Verification.
Re-apply AC line power. Verify front-panel LEDs display normal command status without Wrong Connection, Open Load, or Heater Current Limit fault indicators during test lamp ramps.
6. System Compatibility & Maintenance Notes
The 3096-1000 functions within specialized wafer thermal process environments:
- Tool Compatibility: Primary application in Applied Materials (AMAT) Centura, Endura, and RTP (Rapid Thermal Processing) chamber tool platforms.
- Thermal Management: Maintain clean airflow across external heat sinks to prevent SCR thermal tripping during sustained high-power bakeout cycles.
- Diagnostic Monitoring: Front-panel LEDs continuously monitor Lamp Current, Lamp Command, Outer Heater Current, Inner Heater Current, and Current/Power Limit status for rapid troubleshooting.
7. Frequently Asked Questions (FAQ)
Q: Is this Control Concepts 3096-1000 module brand new or refurbished?
A: This product is a Brand New Surplus unit. It is not used, not pulled from a decommissioned fab tool, and not refurbished. All internal circuitry undergoes complete functional verification prior to dispatch.
Q: Is the 3096-1000 compatible with Applied Materials (AMAT) semiconductor tools?
A: Yes. Control Concepts manufactured the 3096 series specifically as an OEM power control module for Applied Materials processing chambers (AMAT P/N 1001101-0002).
Q: What do the front-panel diagnostic LEDs indicate?
A: The LEDs provide real-time status for lamp command signals, inner/outer heater currents, open load faults, wrong wiring connections, and active current/power limits.
Q: What warranty applies to this New Surplus power controller?
A: We supply this module with a full 1-year functional replacement warranty from the date of shipment to ensure complete operational confidence.
