LAM Research 810-001489-016 Rocker Valve Interface Board

Description

Key Technical Specifications

The strongest consistent identification across current industrial listings is Lam Research 810-001489-016 as a Rocker Valve Interface Board. Multiple sources use essentially the same description, including a semiconductor-parts marketplace that identifies it as a Lam Research PCB with the exact model number.

One secondary listing reports 24 VDC interfaces, 16 digital outputs, a diagnostic LED, 100 × 63.5 × 22.9 mm dimensions, and approximately 0.2 kg weight. These values should be treated as secondary-market specifications rather than OEM-certified specifications because I did not find a public Lam Research datasheet for this exact assembly.

⚠️ Do not confuse this board with similarly numbered Lam Research assemblies. Public listings specifically warn against substituting other suffixes such as 810-001489-002, because connector and circuit assignments may differ.

Product Introduction

The Lam Research 810-001489-016 is a rocker valve interface PCB used in Lam Research semiconductor processing equipment. Its role is to provide the electrical interface between the equipment control system and rocker-valve assemblies, including valve command and status signals.

This is a tool-specific semiconductor spare rather than a general-purpose PLC I/O card. Exact connector pinout, voltage domains, valve configuration, and host-tool compatibility should be verified against the installed board and equipment documentation before replacement.

810-001489-016

810-001489-016

Installation & Configuration Guide

Estimated replacement time: 30–60 minutes for an experienced semiconductor-equipment technician, excluding tool qualification.

Stage 1: Pre-Installation Preparation

⚠️ Safety First

1. Place the Lam Research tool in its approved maintenance state.
2. Stop wafer processing and complete the applicable chamber shutdown sequence.
3. Apply the required electrical, pneumatic, vacuum, and process-gas isolation procedures.
4. Verify hazardous energy has been removed.
5. Follow the fab’s ESD and contamination-control procedures.
6. Confirm the cabinet and board are at an approved service condition.

Tools Required

• ESD wrist strap
• Cleanroom gloves
• Phillips screwdriver
• Digital multimeter
• Connector labels
• Camera/smartphone
• Torque-controlled screwdriver where specified
• Current tool configuration backup

Data Backup

Before removing the existing board:

1. Photograph the complete 810-001489-016 assembly.
2. Record the part number and revision.
3. Photograph all connectors.
4. Record the board’s cabinet/rack location.
5. Photograph cable routing.
6. Record active tool alarms.
7. Save the current equipment configuration where the tool permits it.

⚠️ Do not rely on memory for connector locations. Photograph the original board before disconnecting anything.

Stage 2: Removing the Old Module

1. Confirm the tool is in the approved maintenance state.
2. Verify electrical isolation.
3. Label each connector before removal.
4. Disconnect cables by the connector body rather than pulling on wires.
5. Release the PCB mounting hardware.
6. Remove the board straight from its mounting position.
7. Place the removed PCB in an ESD-safe bag.
8. Inspect the mounting area and connectors.

Check for:

• Bent connector contacts
• Contamination
• Corrosion
• Heat discoloration
• Damaged locking mechanisms
• Loose terminals
• Cable insulation damage

Estimated time: 10–20 minutes.

Stage 3: Installing the New Module

1. Verify the replacement marking is 810-001489-016.
2. Compare the PCB layout against the removed assembly.
3. Confirm connector positions before installation.
4. Wear the ESD wrist strap.
5. Seat the board without forcing connectors.
6. Secure the PCB using the original mounting hardware.
7. Reconnect each cable according to the photographs.
8. Confirm connector locks are fully engaged.
9. Verify grounding/bonding connections where applicable.

Configuration Clone

If the original board contains configurable links, jumpers, or switches:

1. Photograph their original positions.
2. Replicate the exact configuration.
3. Do not assume factory defaults match the installed tool.
4. Verify any address or valve-selection settings against the tool documentation.

Self-Checklist

• Exact 810-001489-016 verified
• Board revision recorded
• Correct cabinet/rack location confirmed
• Connector positions matched
• All cables secured
• Mounting hardware secured
• ESD precautions maintained
• Original configuration documented

Stage 4: Power-On & Testing

1. Perform a visual inspection before energizing the tool.
2. Check for misplaced cables or foreign objects.
3. Restore power according to the Lam Research maintenance procedure.
4. Observe the board’s diagnostic LED.
5. Check tool controller diagnostics.
6. Command the applicable rocker valve through the approved service interface.
7. Verify valve actuation.
8. Verify valve-open/closed status feedback.
9. Check for valve-control or interlock alarms.
10. Confirm all affected valves respond correctly.
11. Perform the equipment-specific functional test.
12. Complete chamber/tool qualification before production release.

⚠️ Do not validate the replacement solely by confirming that the PCB powers up. The important acceptance test is correct command, feedback, interlock behavior, and tool-level operation.

Frequently Asked Questions (FAQ)

1. What is Lam Research 810-001489-016?

It is a Lam Research Rocker Valve Interface Board used in semiconductor processing equipment. Several independent parts listings identify the exact part number with this function.

2. Is 810-001489-016 a PLC I/O module?

Not in the conventional Siemens/Rockwell sense. It is a tool-specific interface PCB. One secondary source describes it as having 16 digital output connections for rocker-valve control, but the exact electrical architecture should be confirmed from Lam Research documentation for the target tool.

3. What equipment uses this board?

Listings associate 810-001489-016 with Lam Research semiconductor equipment, including rocker-valve systems and CMP-related equipment. The exact compatible tool models are not consistently documented in public sources, so the target equipment model should be confirmed before ordering.

4. Can I substitute 810-001489-002?

Do not assume that it is a direct replacement. A current aftermarket listing specifically states that the suffix variants can have different circuit and connector assignments. Match the complete 810-001489-016 number unless the applicable Lam Research documentation confirms an approved substitution.

5. Is 810-001489-016 obsolete?

It appears to be a legacy semiconductor-equipment spare, and new OEM inventory is limited in the secondary market. However, I did not find a public Lam Research lifecycle notice that establishes an official end-of-life date. Current listings show new, used, and parts-condition examples.

6. What condition is available?

Condition varies substantially by supplier. Current listings include new, used, and parts/as-is units. One marketplace listing explicitly identifies a used board with a three-month warranty, while another lists a parts-condition unit with no warranty.

For production equipment, specify New Original/New Surplus or Refurbished Tested rather than accepting an unspecified used board.

7. What should I verify before purchasing?

Provide the supplier with:

• Exact part number: 810-001489-016
• Board revision
• Photos of front and rear
• Connector photographs
• Lam Research tool model
• Cabinet/rack position
• Existing board condition
• Required condition of replacement
• Required warranty
• Functional-test requirements

There are conflicting online descriptions for this part, including an unrelated chamber-liner listing. I would therefore prioritize the physical PCB identification, installed-tool BOM, and Lam Research documentation over generic reseller specifications.

If you have a photo of the actual 810-001489-016 nameplate or PCB, it would help verify the revision and physical configuration before procurement.