Description
3. Key Technical Specifications
| Parameter | Value |
|---|---|
| Connection Flange | DN 16 ISO-KF |
| Actuator | Motorized (integrated electronics) |
| Control Voltage | 0–10 V DC |
| Compatible Controllers | RVC 300 or IF 200 |
| Min. Controllable Gas Flow | 5 × 10⁻⁶ hPa·l/s |
| Max. Controllable Gas Flow | 1.25 × 10³ hPa·l/s |
| Operating Pressure Range | 1 × 10⁻⁸ mbar to 2.5 bar (absolute) |
| Tightness | 1 × 10⁻⁹ mbar l/s |
| Supply Voltage | 24 VDC (±10 %) |
| Power Consumption | Max. 12 W |
| Closing / Opening Time | 3 s / 4 s |
| Housing / Needle Material | Stainless steel |
| Seal Material | FKM |
| Weight | 0.75 kg |
| Ambient Temperature | 5–40 °C |
4. Product Introduction
The Pfeiffer Vacuum EVR 116 is a motorized gas control valve designed for precise pressure regulation in vacuum systems. It operates in either upstream (variable gas flow) or downstream (variable conductance) mode when paired with an RVC 300 controller or IF 200 interface.
The valve delivers a very wide control range from 5 × 10⁻⁶ to 1.25 × 10³ hPa·l/s through a DN 16 ISO-KF flange. Integrated motor electronics accept a 0–10 V analog signal and require only 24 VDC power. Stainless-steel construction and FKM seals make it suitable for clean vacuum processes where reliable, repeatable gas dosing is required.
5. Troubleshooting Quick Reference
| Symptom | Possible Cause | Relevance to this Part | Quick Check Method | Recommendation |
|---|---|---|---|---|
| Valve does not move | Missing 24 VDC or control signal | ✅ High | Measure supply voltage and 0–10 V control signal | Restore power and verify controller output |
| Slow or incomplete travel | Contaminated needle or dosing sleeve | ✅ High | Inspect for process residue; check stroke sensors | Clean or replace valve if contaminated |
| Leak rate higher than specified | Damaged FKM seal or loose flange | ✅ High | Perform helium leak test on connections | Replace seals or re-torque KF clamps |
| Controller reports valve error | Cable fault or internal electronics | ✅ Medium | Swap with known-good cable; check LED/status on RVC 300 | Replace cable first, then valve if needed |
| Pressure control unstable | Wrong flow direction or filter clogged | ✅ Medium | Confirm gas flow direction arrow and filter condition | Install filters correctly; clean or replace |
If the valve fails basic electrical and mechanical checks, record the exact error from the RVC 300 (or IF 200) and contact support with photos of the nameplate and connections.

EVR 116

EVR 116
6. Frequently Asked Questions (FAQ)
Q: What controllers work with the EVR 116?
A: The valve is designed for the Pfeiffer RVC 300 pressure controller or the IF 200 interface card. Both supply the required 0–10 V control signal and monitor valve status.
Q: Can I use the EVR 116 for upstream and downstream control?
A: Yes. Upstream mode varies gas inlet flow; downstream mode varies conductance. The same valve hardware supports both configurations when the controller is set accordingly.
Q: What is the order number for a new EVR 116?
A: The standard order number is PF I39 931 A. Always confirm this number and the serial on the nameplate when ordering a replacement.
Q: Are spare seals available?
A: Yes. FKM seals and the fluoroplastomer dosing sleeve are serviceable parts. Failures due to contamination or wear are not covered under warranty, so keep spare seals on hand for process-critical systems.
Q: What is the maximum bake-out temperature?
A: Housing can be baked to 80 °C; the actuator is limited to 60 °C. Do not exceed these limits or the motor electronics may be damaged.
Q: Does the valve require a filter?
A: Filters are strongly recommended on the inlet side (and optionally on the vacuum side) to protect the needle and dosing sleeve from particles. Contaminated valves lose control accuracy and leak tightness.
Q: Is the EVR 116 still in production?
A: Yes. Pfeiffer Vacuum continues to supply the EVR 116. Stock is typically new units or carefully tested surplus. Lead times can vary; confirm current availability when quoting.

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