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Phone: +86 16626708626Description
Key Technical Specifications
| Parameter | Value |
| Manufacturer | Lam Research |
| Part Number | 61-428059-00 |
| System Compatibility | Lam Research Etch / Thin Film Deposition Platforms |
| Component Type | Precision OEM Chamber / Mechanical Hardware |
| Material Grade | High-Purity Vacuum Alloy / Advanced Technical Ceramic / Elastomer |
| Operating Environment | Process Chamber / Ultra-High Vacuum (UHV) / Cleanroom |
| Packaging | Sealed Anti-Static Double-Bagged Cleanroom Packaging |
| Condition | New Surplus (Unused Factory Original OEM Stock) |
Product Introduction & Supply Chain Strategy
The Lam Research 61-428059-00 is a high-precision replacement component designed specifically for Lam Research wafer processing systems. Engineered to withstand harsh vacuum environments, corrosive process chemistries, and extreme thermal cycling, this part ensures precise mechanical alignment and process repeatability across semiconductor manufacturing lines.
Sourcing this component as New Surplus is a strategic necessity for fab equipment engineers and supply chain managers. In 200mm and 300mm wafer fabrication facilities, unexpected tool downtime can cost tens of thousands of dollars per hour. Stocking unused, factory-fresh OEM inventory eliminates the severe particle contamination and vacuum outgassing risks associated with refurbished or third-party parts, protecting Total Cost of Ownership (TCO) and wafer yield.
Installation & Configuration Guide
1.Pre-Installation (Prep & Safety):Cleanroom prep, tool safety, and staging.
Adhere to strict Class 10/100 cleanroom gowning protocols and equip a grounded ESD wrist strap. Ensure the target Lam tool module or process chamber is fully vented, purged with dry nitrogen, cooled, and isolated following lock-out/tag-out (LOTO) procedures. Prepare cleanroom-grade, non-marring hand tools and lint-free wipes.
2.Removal:Removing the worn component.
Carefully loosen and remove retaining hardware holding the worn component in place inside the tool chamber. Inspect the surrounding mating surfaces, O-ring grooves, and alignment pins for microscopic scratches, process deposition, or thermal wear. Clean the receiving area thoroughly with ultra-pure IPA and allow to dry completely.
3.Installation (Clone & Seat):Precision seating and hardware torquing.
Remove the new 61-428059-00 from its protective double-bagging immediately prior to mounting to prevent ambient particle settling. Carefully align the component with locator pins and seat it flush against its mating surface. Tighten mounting fasteners in a cross-pattern, applying final torque using a calibrated torque wrench per Lam Research engineering specifications.
4.Power-On & Testing:Vacuum pump-down and process qualification.
Close and seal the chamber door or module cover. Initiate automated vacuum pump-down and perform helium leak detection routines to verify seal integrity. Execute baseline sensor zero-point calibrations and motion diagnostic cycles before releasing the tool for production wafer processing.
61-428059-00
61-428059-00
Firmware/Software Versions & Upgrade Notes
- System Alignment: Following physical installation of part number
61-428059-00, perform standard system software zeroing and mechanical homing routines through the Lam Research operator interface. - Part Number Verification: Always confirm the complete part number (
61-428059-00) against your tool’s bill of materials prior to unpacking. Installing incorrect revision variants can lead to vacuum seal leaks, RF arcing, or wafer transfer jams. - Handling Warning: Never handle precision chamber hardware with powdered or unapproved gloves. Skin oils or particulate matter outgas under ultra-high vacuum conditions, causing pump-down failures and chamber contamination.
Frequently Asked Questions (FAQ)
This product is a Brand New Surplus unit. It is not used, not pulled from a decommissioned plant, and not refurbished. All modules undergo rigorous quality verification to ensure OEM-level reliability.
Why choose New Surplus over refurbished or aftermarket Lam Research parts?
In semiconductor fabrication, even microscopic surface pitting or organic contamination can compromise an entire wafer lot, causing catastrophic yield loss. Refurbished parts often contain hidden material stress, altered surface roughness, or embedded chemical residues from past process runs. Our New Surplus 61-428059-00 components are unused OEM originals that deliver factory-fresh performance, zero outgassing risk, and uncompromised service life.
How do you verify the condition of the 61-428059-00?
Our technical specialists conduct comprehensive inbound inspections. We confirm that parts remain in original cleanroom packaging, show zero insertion or tool marks, have pristine sealing faces, and are preserved in climate-controlled, static-safe environments.
Is this part packaged for immediate cleanroom installation?
Yes. All units are maintained in cleanroom-compatible double-bagged packaging, ensuring they remain particle-free and ready for immediate deployment in Class 10/100 cleanroom environments.
How does stocking this part reduce supply chain lead time?
Because this part is held directly in our New Surplus inventory, it is available for immediate dispatch, helping you bypass long OEM factory build lead times and preventing extended tool outages.
What warranty coverage is included with this component?
We back this New Surplus Lam Research 61-428059-00 part with a solid 1-year replacement warranty. If any material defect or functional non-conformance occurs under standard operating conditions within 12 months, we replace the component directly from our available stock.
