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Key Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | MKS Instruments |
| Product family | Baratron |
| Series | Type 122AA |
| Full model | 122AA-00010AB-S |
| Product type | Capacitance manometer absolute pressure transducer |
| Full-scale range | 10 Torr |
| Measurement reference | Absolute pressure |
| Typical application | Vacuum measurement and semiconductor process control |
| Process connection | Verify exact fitting from the nameplate and ordering code |
| Electrical output | Verify exact output type and range from the calibration label |
| Supply voltage | Verify the unit-specific electrical configuration |
| Connector | Verify connector and pin assignment before installation |
| Wetted materials | Verify from the exact MKS ordering code and process compatibility requirements |
| Accuracy and repeatability | Verify from the applicable MKS Type 122AA datasheet |
| Calibration | Request current calibration date and calibration certificate |
| Condition | Supplier-specific; used units are present in the secondary market |
| Availability | Legacy/variant-specific stock; lead time varies |
The base model 122AA-00010AB is identified in secondary-market listings as an MKS Baratron 10 Torr pressure transducer or gauge. Additional listings identify the Type 122AA family as a 10 Torr Baratron unit. The available public results do not verify the “-S” suffix, output configuration, connector, process fitting, accuracy, or supply voltage; obtain the exact MKS datasheet and calibration label before making a compatibility claim.
Product Introduction
The MKS Instruments 122AA-00010AB-S is a Type 122AA Baratron capacitance manometer intended for absolute low-pressure measurement. The base 122AA-00010AB configuration is listed as a 10 Torr vacuum pressure transducer used in vacuum and semiconductor equipment.
The final “-S” suffix must be treated as significant. Verify the electrical output, process connection, wetted materials, connector, calibration range, and temperature compensation before replacement. A 10 Torr range alone does not guarantee compatibility with the controller or vacuum tool.
122AA-00010AB-S
122AA-00010AB-S
Troubleshooting Quick Reference
| Symptom | Possible Cause | Relevance to This Part | Quick Check Method | Recommendation |
|---|---|---|---|---|
| Controller reads zero pressure | Missing transducer power, open cable, incorrect pinout, or sensor failure | ✅ High | Measure supply voltage at the transducer connector using the exact MKS pinout | Verify wiring and supply before replacing the Baratron |
| Reading is fixed at full scale | Overpressure, wrong output range, open signal return, or damaged sensor | ✅ High | Compare the displayed value with an independent vacuum gauge and check the analog output at the transducer | Isolate process pressure from electrical fault before replacement |
| Reading is unstable at constant pressure | Vibration, temperature variation, electrical noise, contamination, or sensor damage | ✅ Medium | Compare the Baratron output with a calibrated reference gauge and monitor supply stability | Check grounding, cable routing, and process conditions before replacing it |
| Reading differs from a reference gauge | Calibration drift, gauge-location difference, temperature effect, or wrong full-scale range | ✅ High | Compare both gauges at several stable pressure points and confirm the 10 Torr range | Send the unit for calibration or replace it if drift exceeds the process limit |
| Controller displays an overrange alarm | Pressure exceeds the 10 Torr full-scale range or output configuration is wrong | ✅ High | Check actual chamber pressure with a suitable reference instrument and confirm controller scaling | Do not operate beyond the rated range; correct scaling or process pressure |
| Signal is correct at the sensor but wrong at the controller | Cable resistance, grounding, input scaling, or controller input mismatch | ❌ Medium | Measure the output at the transducer and again at the controller input | Repair wiring or correct input configuration before replacing the sensor |
| Sensor fails after chamber maintenance | Contamination, moisture, damaged diaphragm, incorrect cleaning, or mechanical impact | ✅ High | Inspect the process port and compare zero response after proper warm-up | Follow MKS cleaning and installation procedures; avoid touching the diaphragm |
| Slow response to pressure changes | Restricted port, contamination, process plumbing restriction, or damping configuration | ✅ Medium | Compare response with a known-good gauge and inspect the process line | Clean or service the port and plumbing before replacing the transducer |
| Zero shifts after power-up | Insufficient warm-up, thermal instability, supply problem, or calibration drift | ✅ Medium | Allow the documented warm-up period and monitor zero at stable vacuum | Re-zero only if the MKS procedure permits it; otherwise calibrate the unit |
| No signal after installing a replacement | Wrong “-S” variant, incompatible output, wrong connector, or incorrect supply | ✅ High | Compare complete part labels, electrical codes, connector wiring, and controller input type | Match the complete ordering code, not just “122AA” or “10 Torr” |
| Transducer is exposed to corrosive gas | Incompatible wetted materials or sensor contamination | ✅ High | Review process gas, materials, and exposure history against MKS compatibility data | Stop use and verify material compatibility before reinstalling |
| Unit was handled without ESD or mechanical protection | Damage to electronics, connector, or sensing assembly | ✅ Medium | Inspect the connector and housing, then perform a controlled electrical and vacuum test | Use ESD protection and install with the process port capped until connection |
Support note: If the fault remains, contact technical support with photos of the full nameplate, suffix, process fitting, connector, calibration label, controller input settings, supply measurements, and reference-gauge readings.
Frequently Asked Questions
What does “10 Torr” mean on the 122AA-00010AB-S?
It identifies the nominal full-scale pressure range of the base 122AA-00010AB configuration as 10 Torr. Confirm whether the application requires absolute pressure, the exact controller scaling, and the correct output range.
Is 122AA-00010AB-S the same as 122AA-00010AB?
Not automatically. The final “-S” may identify a specific electrical, mechanical, material, or calibration configuration. Match the complete ordering code and request a clear photo of the nameplate before buying.
Is the MKS 122AA a vacuum gauge or a pressure transducer?
It can be described as a Baratron pressure transducer or gauge in the secondary market. In an installed system, it functions as the sensing transducer and requires compatible power, signal wiring, process connection, and controller scaling.
Can I substitute another 10 Torr Baratron?
Do not substitute by range alone. Verify output type, supply voltage, connector, process fitting, materials, temperature compensation, calibration, and controller input requirements. A different MKS series or electrical suffix may produce an incompatible signal even when the range is also 10 Torr.
Can I hot-swap this transducer?
Do not assume it is safe. Isolate electrical power, bring the chamber to a safe pressure, and follow the vacuum tool’s maintenance procedure before disconnecting the sensor. Protect the process port from contamination and avoid exposing the diaphragm to mechanical shock.
Does the transducer need calibration after replacement?
Yes, the replacement should have traceable calibration appropriate to the process. Record the calibration date and certificate, allow the unit to reach operating temperature, and verify zero and span against an approved reference before returning the tool to production.
Is the 122AA-00010AB-S obsolete?
The base 122AA-00010AB appears mainly through used and specialist surplus channels in current search results. Treat the exact “-S” variant as limited-stock unless MKS confirms current production or support.
What should the supplier test before shipping?
Request electrical power-up, output verification at multiple pressure points, zero stability, connector inspection, process-port inspection, leak or vacuum testing where available, and a current calibration certificate. The supplier should state whether the unit is New Original (New Surplus), Factory Sealed, or Refurbished (tested), and provide warranty and return terms.
