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Komatsu AIH-123QS-PP-UC In-Line Chemical Heater

  • Model: AIH-123QS-PP-UC
  • Brand: Komatsu / Kurita (Komatsu Electronics)
  • Series: AIH Series In-Line Fluid Heaters
  • Core Function: High-purity in-line chemical and ultrapure water (UPW) heating for semiconductor processing.
  • Product Type: Industrial Process Fluid Heater / Quartz Chemical Heating Module
  • Key Specs: High-Purity Quartz Flow Path | Polypropylene Outer Enclosure | Ultra-Clean Design
  • Condition: New Original / New Surplus (Unused factory original)
  • Inventory Status: Legacy / High-Value Spare — Critical buffer stock unit for semiconductor tool maintenance.
Categories: , , , , SKU: AIH-123QS-PP-UC Brand:

Description

Key Technical Specifications

Parameter Specification / Value
Manufacturer Komatsu / Kurita
Part Number AIH-123QS-PP-UC
Application Semiconductor wet bench, wafer cleaning, and chemical dispensing
Wetted Materials High-purity quartz internal tube (QS) / PFA fittings
Enclosure Material Polypropylene (PP) protective body
Heating Elements Indirect quartz sleeve resistance heating
Control / Interlocks Integrated thermal over-temperature limit switches and liquid detection sensors
Operating Fluid Ultrapure Water (UPW), acids, and high-purity process chemicals
Mounting Orientation Horizontal or vertical mounting frame brackets

 

Product Introduction & Supply Chain Strategy

The Komatsu AIH-123QS-PP-UC is an in-line quartz fluid heater built for high-purity chemical heating in semiconductor manufacturing, wet bench processing, and wafer cleaning systems. Featuring a high-purity quartz flow tube enclosed within a chemical-resistant polypropylene body, this unit heats process chemicals and ultrapure water without metallic contamination or leaching.

Maintaining an Unused New Surplus AIH-123QS-PP-UC heater in facility inventory serves as essential insurance for semiconductor fabrication lines. Because heating elements experience thermal stress and eventual degradation, unexpected heater failure leads to complete wet-bench downtime and compromised wafer yields. Stocking a verified, unused OEM surplus unit eliminates long factory lead times and ensures immediate replacement readiness, lowering your overall Total Cost of Ownership (TCO).

AIH-123QS-PP-UC

AIH-123QS-PP-UC

AIH-123QS-PP-UC

AIH-123QS-PP-UC

Installation & Configuration Guide

1

Pre-Installation & Safety Preparation

Drain chemicals and de-energize heating power before servicing

1.Pre-Installation & Safety Preparation:Drain chemicals and de-energize heating power before servicing.

  1. Lock out and tag out the main high-voltage power feeds supplying the heater control panel.
  2. Purge and flush chemical lines with ultrapure water (UPW) and N2 gas to ensure no corrosive residues remain.
  3. Put on appropriate chemical handling PPE and an ESD wrist strap before handling electrical control leads.

2

Fluid Line & Mechanical Removal

2.Fluid Line & Mechanical Removal:

  1. Unthread PFA chemical inlet and outlet fittings carefully using dedicated plastic wrenches to avoid cracking quartz tube connections.
  2. Disconnect over-temperature sensor leads and power wiring at the terminal junction box.
  3. Loosen mounting bracket hardware and support the unit to prevent mechanical shock to internal quartz components.

3

Replacement Installation & Connection

3.Replacement Installation & Connection:

  1. Mount the replacement AIH-123QS-PP-UC unit onto its support frame without putting mechanical tension on fluid ports.
  2. Reattach PFA process fluid lines using proper torque guidelines to ensure leak-tight sealing without over-tightening quartz threads.
  3. Reconnect heating element power cables and thermal safety interlock wires according to system schematic guidelines.

4

Leak Testing & Power Commissioning

4.Leak Testing & Power Commissioning:

  1. Run UPW through the heater at operational pressure and inspect all fittings and seals for leaks before applying power.
  2. Verify liquid presence sensor functionality to ensure the heater cannot energize under dry-run conditions.
  3. Apply power, set temperature parameters on the controller, and verify stable thermal response without triggering over-temperature alarms.

 

Firmware/Software Versions & Upgrade Notes

  • Hardware Interlock Integration: The AIH-123QS-PP-UC operates via external PID temperature controllers and safety interlock modules. Ensure that thermal sensor types (e.g., RTD Pt100 or Thermocouples) match the controller input configuration.
  • Dry-Run Protection: Never bypass the dry-burn safety interlocks. Energizing the heating elements without continuous fluid flow will cause immediate thermal shock and shatter the quartz internal flow tube.
  • Thermal Ramp Control: Program PID ramp rates according to OEM specifications to prevent excessive thermal stress during cold startup cycles.

 

Frequently Asked Questions (FAQ)

Is this Komatsu heater brand new or refurbished?

This unit is New Surplus (Original New). It is unused OEM inventory sourced from fab surplus or tool-integration overstock. It has never been installed in an active semiconductor manufacturing line or exposed to process chemicals.

Why choose New Surplus over a refurbished chemical heater?

Refurbished semiconductor heaters carry significant risks of invisible micro-fractures in quartz tubes, degraded heating wire insulation, and chemical trace contamination. A failed heater in a fab line can destroy high-value wafer lots or cause hazardous chemical leaks. Buying New Surplus ensures factory-fresh quartz structural integrity and 100% process cleanliness.

What do the “QS” and “PP” codes stand for in the part number?

“QS” indicates the Quartz Sleeve / Quartz Tube fluid path designed for high-purity chemical compatibility, while “PP” specifies the Polypropylene outer protective housing.

Can this heater be used with strong acids?

Yes, the high-purity quartz flow path is resistant to most semiconductor process acids and ultrapure water. Always verify chemical compatibility with your process engineering team prior to installation.

What warranty is provided with this surplus unit?

We back this unit with a 1-Year Comprehensive Replacement Warranty. Every heater undergoes visual inspection and continuity checks before shipment to guarantee operational readiness out of the box.